Emerging semiconductor technology : a symposium /
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| 企业作者: | , |
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| 其他作者: | , |
| 格式: | 会议录 图书 |
| 语言: | 英语 |
| 出版: |
Philadelphia, PA :
American Society for Testing and Materials,
c1987.
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| 丛编: | ASTM special technical publication ;
960 |
| 主题: | |
| 标签: |
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| Item Description: | Papers presented at the Fourth International Symposium on Semiconductor Processing. "ASTM publication code number (PCN) 04-960000-46." |
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| 实物描述: | 704 p. : ill. ; 24 cm. |
| 参考书目: | Includes bibliographies and indexes. |
| ISBN: | 0803104596 |