Semiconductor fabrication : technology and metrology /

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Bibliographic Details
Main Author:	Gupta Dinesh C.
Other Authors:	Sze, S. M.
Format:	Book
Language:	English
Published:	Philadelphia : ASTM, c1989.
Subjects:	Semiconductors > Design and construction. Integrated circuits. > Design and construction.
Online Access:	Contributor biographical information Publisher description Table of contents
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