Emerging semiconductor technology : a symposium /
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| Enti autori: | , |
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| Altri autori: | , |
| Natura: | Atti del Convegno Libro |
| Lingua: | inglese |
| Pubblicazione: |
Philadelphia, PA :
American Society for Testing and Materials,
c1987.
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| Serie: | ASTM special technical publication ;
960 |
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| 050 | 0 | 0 | |a TK7871.85 |b .E47 1987 |
| 082 | 0 | 0 | |a 621.3815/2 |2 19 |
| 245 | 0 | 0 | |a Emerging semiconductor technology : |b a symposium / |c sponsored by ASTM Committee F-1 on Electronics, San Jose, CA, 28-31 Jan. 1986 ; Dinesh C. Gupta and Paul H. Langer, editors. |
| 260 | |a Philadelphia, PA : |b American Society for Testing and Materials, |c c1987. | ||
| 300 | |a 704 p. : |b ill. ; |c 24 cm. | ||
| 440 | 0 | |a ASTM special technical publication ; |v 960 | |
| 500 | |a Papers presented at the Fourth International Symposium on Semiconductor Processing. | ||
| 500 | |a "ASTM publication code number (PCN) 04-960000-46." | ||
| 504 | |a Includes bibliographies and indexes. | ||
| 541 | |e 14347 | ||
| 650 | 0 | |a Semiconductor industry |x Congresses. | |
| 650 | 0 | |a Semiconductors |x Design and construction |x Congresses. | |
| 700 | 1 | |a Gupta, D. C. |q (Dinesh C.) | |
| 700 | 1 | |a Langer, Paul H. | |
| 710 | 2 | |a ASTM Committee F-1 on Electronics. | |
| 711 | 2 | |a Symposium on Semiconductor Processing |n (4th : |d 1986 : |c San Jose, Calif.) | |
| 942 | |2 ddc |c TEXT | ||
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