Emerging semiconductor technology : a symposium /
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| Corporate Authors: | , |
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| Andre forfattere: | , |
| Format: | Conference Proceeding Bog |
| Sprog: | engelsk |
| Udgivet: |
Philadelphia, PA :
American Society for Testing and Materials,
c1987.
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| Serier: | ASTM special technical publication ;
960 |
| Fag: | |
| Tags: |
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| Emne beskrivelse: | Papers presented at the Fourth International Symposium on Semiconductor Processing. "ASTM publication code number (PCN) 04-960000-46." |
|---|---|
| Fysisk beskrivelse: | 704 p. : ill. ; 24 cm. |
| Bibliografi: | Includes bibliographies and indexes. |
| ISBN: | 0803104596 |