Emerging semiconductor technology : a symposium /
Shranjeno v:
| Corporate Authors: | , |
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| Drugi avtorji: | , |
| Format: | Conference Proceeding Knjiga |
| Jezik: | angleščina |
| Izdano: |
Philadelphia, PA :
American Society for Testing and Materials,
c1987.
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| Serija: | ASTM special technical publication ;
960 |
| Teme: | |
| Oznake: |
Brez oznak, prvi označite!
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| Opis knjige/članka: | Papers presented at the Fourth International Symposium on Semiconductor Processing. "ASTM publication code number (PCN) 04-960000-46." |
|---|---|
| Fizični opis: | 704 p. : ill. ; 24 cm. |
| Bibliografija: | Includes bibliographies and indexes. |
| ISBN: | 0803104596 |