Emerging semiconductor technology : a symposium /

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Údair chorparáideacha: ASTM Committee F-1 on Electronics, Symposium on Semiconductor Processing
Rannpháirtithe: Gupta, D. C. (Dinesh C.), Langer, Paul H.
Formáid: Imeacht comhdhála LEABHAR
Teanga:Béarla
Foilsithe / Cruthaithe: Philadelphia, PA : American Society for Testing and Materials, c1987.
Sraith:ASTM special technical publication ; 960
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Cur síos
Cur síos ar an mír:Papers presented at the Fourth International Symposium on Semiconductor Processing.
"ASTM publication code number (PCN) 04-960000-46."
Cur síos fisiciúil:704 p. : ill. ; 24 cm.
Leabharliosta:Includes bibliographies and indexes.
ISBN:0803104596