Semiconductor fabrication : technology and metrology /
Saved in:
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
Philadelphia :
ASTM,
c1989.
|
| Subjects: | |
| Online Access: | Contributor biographical information Publisher description Table of contents |
| Tags: |
No Tags, Be the first to tag this record!
|
| Physical Description: | 476 p. : ill. ; 24 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0803112734 |