APA (7th ed.) Citation
Gupta Dinesh C. & Sze, S. M. (1989). Semiconductor fabrication: Technology and metrology. ASTM.
Chicago Style (17th ed.) Citation
Gupta Dinesh C. and S. M. Sze. Semiconductor Fabrication: Technology and Metrology. Philadelphia: ASTM, 1989.
MLA (9th ed.) Citation
Gupta Dinesh C. and S. M. Sze. Semiconductor Fabrication: Technology and Metrology. ASTM, 1989.
Warning: These citations may not always be 100% accurate.