Semiconductor fabrication : technology and metrology /
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| Hovedforfatter: | |
|---|---|
| Andre forfattere: | |
| Format: | Bog |
| Sprog: | engelsk |
| Udgivet: |
Philadelphia :
ASTM,
c1989.
|
| Fag: | |
| Online adgang: | Contributor biographical information Publisher description Table of contents |
| Tags: |
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MARC
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| 010 | |a 2003276248 | ||
| 020 | |a 0803112734 | ||
| 040 | |a BD-DhMIS |c BD-DhMIS |d HKP |d FUG |d DLC | ||
| 050 | 0 | 0 | |a TK7871.85 |b .M378 2004 |
| 082 | 0 | 0 | |a 621.3815/2 |2 22 |
| 100 | 1 | |a Gupta Dinesh C. | |
| 245 | 1 | 0 | |a Semiconductor fabrication : |c Dinesh C. Gupta. |b technology and metrology / |
| 260 | |a Philadelphia : |b ASTM, |c c1989. | ||
| 300 | |a 476 p. : |b ill. ; |c 24 cm. | ||
| 504 | |a Includes bibliographical references and index. | ||
| 541 | |e 52674 | ||
| 650 | 0 | |a Semiconductors |x Design and construction. | |
| 650 | 0 | |a Integrated circuits. |x Design and construction. | |
| 700 | 1 | |a Sze, S. M. | |
| 856 | 4 | 2 | |3 Contributor biographical information |u http://www.loc.gov/catdir/bios/wiley044/2003276248.html |
| 856 | 4 | 2 | |3 Publisher description |u http://www.loc.gov/catdir/description/wiley037/2003276248.html |
| 856 | 4 | 1 | |3 Table of contents |u http://www.loc.gov/catdir/toc/wiley032/2003276248.html |
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