The science and engineering of microelectronic fabrication /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
New York ; New Delhi :
Oxford University Press,
2001.[Repriented 2004]
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| Edition: | 2nd ed. |
| Series: | The Oxford series in electrical and computer engineering
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| Subjects: | |
| Online Access: | Publisher description Table of contents only |
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