The science and engineering of microelectronic fabrication /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
New York :
Oxford University Press,
1996.
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| Series: | Oxford series in electrical engineering
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| Subjects: | |
| Online Access: | Publisher description Table of contents only |
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| Physical Description: | xv, 536 p. : ill. ; 25 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0195105087 (cl : acidfree paper) |