The science and engineering of microelectronic fabrication /
Shranjeno v:
| Glavni avtor: | |
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| Format: | Knjiga |
| Jezik: | angleščina |
| Izdano: |
New York :
Oxford University Press,
1996.
|
| Serija: | Oxford series in electrical engineering
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| Teme: | |
| Online dostop: | Publisher description Table of contents only |
| Oznake: |
Brez oznak, prvi označite!
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| Fizični opis: | xv, 536 p. : ill. ; 25 cm. |
|---|---|
| Bibliografija: | Includes bibliographical references and index. |
| ISBN: | 0195105087 (cl : acidfree paper) |