The science and engineering of microelectronic fabrication /
Збережено в:
| Автор: | |
|---|---|
| Формат: | Книга |
| Мова: | Англійська |
| Опубліковано: |
New York :
Oxford University Press,
1996.
|
| Серія: | Oxford series in electrical engineering
|
| Предмети: | |
| Онлайн доступ: | Publisher description Table of contents only |
| Теги: |
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MARC
| LEADER | 00000nam a2200000 a 4500 | ||
|---|---|---|---|
| 001 | 26193 | ||
| 003 | mist | ||
| 005 | 20130916080734.0 | ||
| 008 | 130916s1996 nyua b 001 0 eng d | ||
| 010 | |a 95035577 | ||
| 020 | |a 0195105087 (cl : acidfree paper) | ||
| 040 | |a DLC |c DLC |d DLC |d BD-DhMIS | ||
| 050 | 0 | 0 | |a TK7871.85 |b .C25 1996 |
| 082 | 0 | 0 | |a 621.3815/2 |2 20 |
| 100 | 1 | |a Campbell, Stephen A., |d 1954- | |
| 245 | 1 | 4 | |a The science and engineering of microelectronic fabrication / |c Stephen A. Campbell. |
| 260 | |a New York : |b Oxford University Press, |c 1996. | ||
| 300 | |a xv, 536 p. : |b ill. ; |c 25 cm. | ||
| 440 | 0 | |a Oxford series in electrical engineering | |
| 504 | |a Includes bibliographical references and index. | ||
| 541 | |e 26193 | ||
| 650 | 0 | |a Semiconductors |x Design and construction. | |
| 856 | 4 | 2 | |3 Publisher description |u http://www.loc.gov/catdir/enhancements/fy0640/95035577-d.html |
| 856 | 4 | 1 | |3 Table of contents only |u http://www.loc.gov/catdir/enhancements/fy0640/95035577-t.html |
| 942 | |2 ddc |c REF | ||
| 952 | |0 0 |1 0 |2 ddc |4 0 |6 621_381520000000000_CAM |7 0 |9 16842 |a MISTCL |b MISTCL |d 2013-09-16 |e S.S enterprise |g 4500.00 |l 0 |o 621.3815/2 CAM |p 3010026193 |r 2013-09-16 00:00:00 |t 1 |w 2013-09-16 |y REF | ||
| 955 | |a pb16 to ja00 07-19-95; jf06 to subj 07-20-95; jf11 to sl 07-21-95.; jf1307-21-95; CIP ver. pv07 07-15-96 | ||
| 999 | |c 2071 |d 2071 | ||