Semiconductor fabrication : technology and metrology /
Bewaard in:
| Hoofdauteur: | |
|---|---|
| Andere auteurs: | |
| Formaat: | Boek |
| Taal: | Engels |
| Gepubliceerd in: |
Philadelphia :
ASTM,
c1989.
|
| Onderwerpen: | |
| Online toegang: | Contributor biographical information Publisher description Table of contents |
| Tags: |
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Gelijkaardige items: Semiconductor fabrication :
- Fundamentals of semiconductor fabrication /
- The science and engineering of microelectronic fabrication /
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