Semiconductor fabrication : technology and metrology /
Guardat en:
| Autor principal: | |
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| Altres autors: | |
| Format: | Llibre |
| Idioma: | anglès |
| Publicat: |
Philadelphia :
ASTM,
c1989.
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| Matèries: | |
| Accés en línia: | Contributor biographical information Publisher description Table of contents |
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Ítems similars: Semiconductor fabrication :
- Fundamentals of semiconductor fabrication /
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- Semiconductor devices, physics and technology /