Gupta Dinesh C. & Sze, S. M. (1989). Semiconductor fabrication: Technology and metrology. ASTM.
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Citación estilo Chicago
Gupta Dinesh C. and S. M. Sze. Semiconductor Fabrication: Technology and Metrology. Philadelphia: ASTM, 1989.
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Cita MLA
Gupta Dinesh C. and S. M. Sze. Semiconductor Fabrication: Technology and Metrology. ASTM, 1989.
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