Cita APA (7th ed.)
Gupta Dinesh C. & Sze, S. M. (1989). Semiconductor fabrication: Technology and metrology. ASTM.
Cita Chicago (17th ed.)
Gupta Dinesh C. i S. M. Sze. Semiconductor Fabrication: Technology and Metrology. Philadelphia: ASTM, 1989.
Cita MLA (9th ed.)
Gupta Dinesh C. i S. M. Sze. Semiconductor Fabrication: Technology and Metrology. ASTM, 1989.
Atenció: Aquestes cites poden no estar 100% correctes.