The science and engineering of microelectronic fabrication /
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| Hovedforfatter: | |
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| Format: | Bog |
| Sprog: | engelsk |
| Udgivet: |
New York ; New Delhi :
Oxford University Press,
2001.[Repriented 2004]
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| Udgivelse: | 2nd ed. |
| Serier: | The Oxford series in electrical and computer engineering
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| Fag: | |
| Online adgang: | Publisher description Table of contents only |
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