The science and engineering of microelectronic fabrication /
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| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
New York ; New Delhi :
Oxford University Press,
2001.[Repriented 2004]
|
| Edition: | 2nd ed. |
| Series: | The Oxford series in electrical and computer engineering
|
| Subjects: | |
| Online Access: | Publisher description Table of contents only |
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MARC
| LEADER | 00000nam a22000004a 4500 | ||
|---|---|---|---|
| 001 | 21613 | ||
| 003 | MIST | ||
| 005 | 20130916104345.0 | ||
| 008 | 001005s20042001I a b 001 0 eng d | ||
| 010 | |a 00051022 | ||
| 020 | |a 0195136055 | ||
| 020 | |a 9780195136050 | ||
| 040 | |a DLC |c DLC |d DLC |d BD-DhMIS | ||
| 050 | 0 | 0 | |a TK7871.85 |b .C25 2001 |
| 082 | 0 | 0 | |a 621.3815/2 |2 21 |
| 100 | 1 | |a Campbell, Stephen A., |d 1954- | |
| 245 | 1 | 4 | |a The science and engineering of microelectronic fabrication / |c Stephen A. Campbell. |
| 250 | |a 2nd ed. | ||
| 260 | |a New York ; |a New Delhi : |b Oxford University Press, |c 2001.[Repriented 2004] | ||
| 300 | |a xiv, 603 p. : |b ill. ; |c 24 cm. | ||
| 440 | 4 | |a The Oxford series in electrical and computer engineering | |
| 504 | |a Includes bibliographical references and index. | ||
| 541 | |e 21613 | ||
| 650 | 0 | |a Semiconductors |x Design and construction. | |
| 856 | 4 | 2 | |3 Publisher description |u http://www.loc.gov/catdir/enhancements/fy0610/00051022-d.html |
| 856 | 4 | 1 | |3 Table of contents only |u http://www.loc.gov/catdir/enhancements/fy0610/00051022-t.html |
| 942 | |2 ddc |c REF | ||
| 955 | |a to ASCD pc16 10-05-00; jg11 10-05-00; jg12 10-17-00; jg08 to Dewey 10-17-00; aa07 10-20-00; |a jg20 2001-08-06, copy 2 | ||
| 999 | |c 2095 |d 2095 | ||