APA (7th ed.) Citation
Campbell, S. A. (2001). The science and engineering of microelectronic fabrication (2nd ed.). Oxford University Press.
Chicago Style (17th ed.) Citation
Campbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. 2nd ed. New York ; New Delhi: Oxford University Press, 2001.
MLA (9th ed.) Citation
Campbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. 2nd ed. Oxford University Press, 2001.
Warning: These citations may not always be 100% accurate.