Cita APA (7th ed.)
Campbell, S. A. (1996). The science and engineering of microelectronic fabrication. Oxford University Press.
Cita Chicago (17th ed.)
Campbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. New York: Oxford University Press, 1996.
Cita MLA (9th ed.)
Campbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. Oxford University Press, 1996.
Atenció: Aquestes cites poden no estar 100% correctes.