Fabrication Engineering : At the Micro-and Nanoscale /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
New York :
Oxford University Press ,
c2012.
|
| Edition: | 4th ed. |
| Subjects: | |
| Tags: |
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| Physical Description: | x, 637p. : illus. ; 24 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9780199861224 |