Atomic Layer Processing - Semiconductor Dry Etching Technology (1st Edition)
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| Main Author: | |
|---|---|
| Format: | eBook |
| Language: | English |
| Published: |
Wiley,
2021.
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| Subjects: | |
| Online Access: | Access eBook |
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| LEADER | 00000nam a2200000 a 4500 | ||
|---|---|---|---|
| 001 | 28079 | ||
| 005 | 20261004183857.0 | ||
| 008 | 261004s2021 o 000 eng | ||
| 020 | |a 9783527824199 | ||
| 100 | 1 | |a Lill, Thorsten |9 57104 | |
| 245 | 0 | 0 | |a Atomic Layer Processing - Semiconductor Dry Etching Technology (1st Edition) |
| 260 | |b Wiley, |c 2021. | ||
| 300 | |a 1 online resource | ||
| 650 | 4 | |a Science & Technology | |
| 538 | |a Mode of access: World Wide Web. | ||
| 856 | 4 | 0 | |u https://library.mist.ac.bd/ebooks/14150/go?src=vufind |z Access eBook |
| 942 | |c EBOOK | ||
| 999 | |c 28079 |d 28079 | ||