Lill, T. (2021). Atomic Layer Processing - Semiconductor Dry Etching Technology (1st Edition). Wiley.
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Chicago Style (17th ed.) Citation
Lill, Thorsten. Atomic Layer Processing - Semiconductor Dry Etching Technology (1st Edition). Wiley, 2021.
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MLA (9th ed.) Citation
Lill, Thorsten. Atomic Layer Processing - Semiconductor Dry Etching Technology (1st Edition). Wiley, 2021.
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Warning: These citations may not always be 100% accurate.