VLSI fabrication principles : silicon and gallium arsenide /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
New York ; New New Delhi :
Wiley,
c1994.
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| Edition: | 2nd ed. |
| Subjects: | |
| Tags: |
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| Item Description: | "A Wiley-Interscience publication." |
|---|---|
| Physical Description: | xxiv, 834 p. : ill. ; 24 cm. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0471580058 (alk. paper) 9788126517909 |