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|2 21
|a 537.6/223
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| 100 |
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|a Ghandhi, Sorab K.
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| 245 |
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|a VLSI fabrication principles:
|b Silicon and gallium arsenide /
|c Sorab K. Ghandhi
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| 250 |
|
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|a 2nd ed.
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| 260 |
|
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|a New Delhi :
|b Wiley,
|c c1994 [reprinted 2010].
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| 300 |
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|a xxiv, 834 p. :
|b ill. ;
|c 24 cm.
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| 504 |
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|a Includes bibliography and index.
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| 650 |
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|a Silicon.
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| 942 |
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|b EECEDL
|d 2013-09-05
|e Paragon
|g 634.00
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|p 3010025941
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|y REF
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| 999 |
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|c 1563
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