VLSI fabrication principles: Silicon and gallium arsenide /

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Bibliographic Details
Main Author:	Ghandhi, Sorab K.
Format:	Book
Language:	English
Published:	New Delhi : Wiley, c1994 [reprinted 2010].
Edition:	2nd ed.
Subjects:	Silicon.
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Description
Physical Description:	xxiv, 834 p. : ill. ; 24 cm.
Bibliography:	Includes bibliography and index.
ISBN:	9788116517909

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