Campbell, S. A. (2001). The science and engineering of microelectronic fabrication (2nd ed.). Oxford University Press.
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Cita Chicago (17th ed.)
Campbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. 2nd ed. New York ; New Delhi: Oxford University Press, 2001.
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Cita MLA (9th ed.)
Campbell, Stephen A. The Science and Engineering of Microelectronic Fabrication. 2nd ed. Oxford University Press, 2001.
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Atenció: Aquestes cites poden no estar 100% correctes.