Antzeko izenburuak: Fabrication Engineering :
- Fabrication Engineering : At the Micro-and Nanoscale /
- The science and engineering of microelectronic fabrication /
- The science and engineering of microelectronic fabrication /
- Semiconductor fabrication : technology and metrology /
- Fundamentals of semiconductor fabrication /
- VLSI fabrication principles : silicon and gallium arsenide /