Micro electronic and mechanical systems /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Croatia :
InTech ,
c2016.
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| Subjects: | |
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| Physical Description: | ix, 514p. : ill. : 22 cm. |
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| Bibliography: | Includes bibliographical references. |
| ISBN: | 9789533070278 |