Tapered Beams in MEMS
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| Main Author: | |
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| Other Authors: | |
| Format: | eBook |
| Language: | English |
| Published: |
Springer Nature,
2024.
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| Subjects: | |
| Online Access: | Access eBook |
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| Physical Description: | 1 online resource |
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| Format: | Mode of access: World Wide Web. |
| ISBN: | 978-3-031-66391-8 |