Fabrication of Micro/Nano Structures via Precision Machining

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Bibliographic Details
Main Author: Zhang, Guoqing
Other Authors: Xu, Bin, Lu, Yanjun, To, Suet
Format: eBook
Language:English
Published: Springer Nature, 2023.
Subjects:
Online Access:Access eBook
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700 1 |a Lu, Yanjun  |9 48275 
700 1 |a To, Suet  |9 45958 
245 0 0 |a Fabrication of Micro/Nano Structures via Precision Machining 
260 |b Springer Nature,  |c 2023. 
300 |a 1 online resource 
650 4 |a Engineering 
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